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Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging
dc.contributor.author | Brady-Boyd, Anita | |
dc.contributor.author | Chery, Emmanuel | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2022-09-08T02:38:35Z | |
dc.date.available | 2022-09-08T02:38:35Z | |
dc.date.issued | 2022-AUG 24 | |
dc.identifier.issn | 1948-7185 | |
dc.identifier.other | WOS:000848554500001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40364 | |
dc.source | WOS | |
dc.title | Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Brady-Boyd, Anita | |
dc.contributor.imecauthor | Chery, Emmanuel | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
dc.contributor.orcidimec | Chery, Emmanuel::0000-0002-2526-3873 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.identifier.doi | 10.1021/acs.jpclett.2c02080 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF PHYSICAL CHEMISTRY LETTERS | |
dc.identifier.pmid | MEDLINE:36000826 | |
imec.availability | Under review |
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