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Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging

dc.contributor.authorBrady-Boyd, Anita
dc.contributor.authorChery, Emmanuel
dc.contributor.authorArmini, Silvia
dc.date.accessioned2022-09-08T02:38:35Z
dc.date.available2022-09-08T02:38:35Z
dc.date.issued2022-AUG 24
dc.identifier.issn1948-7185
dc.identifier.otherWOS:000848554500001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40364
dc.sourceWOS
dc.titleInvestigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging
dc.typeJournal article
dc.typeJournal article (pre-print)
dc.contributor.imecauthorBrady-Boyd, Anita
dc.contributor.imecauthorChery, Emmanuel
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecBrady-Boyd, Anita::0000-0002-9257-6837
dc.contributor.orcidimecChery, Emmanuel::0000-0002-2526-3873
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.identifier.doi10.1021/acs.jpclett.2c02080
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.journalJOURNAL OF PHYSICAL CHEMISTRY LETTERS
dc.identifier.pmidMEDLINE:36000826
imec.availabilityUnder review


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220.500.12860/40364.22022-11-10T09:27:12Zvalidation by library/open access desk
120.500.12860/40364*2022-09-08T02:38:35Z

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