Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/40384.3
Overlay challenges in 3D heterogeneous integration
dc.contributor.author | Grauer, Yoav | |
dc.contributor.author | Miller, Andy | |
dc.contributor.author | La Tulipe, Douglas Charles | |
dc.contributor.author | Manassen, Amnon | |
dc.contributor.author | Eisenbach, Shlomo | |
dc.contributor.author | Bachar, Ohad | |
dc.contributor.author | Gronheid, Roel | |
dc.date.accessioned | 2022-09-08T02:39:17Z | |
dc.date.available | 2022-09-08T02:39:17Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4981-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844549800012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40384 | |
dc.source | WOS | |
dc.title | Overlay challenges in 3D heterogeneous integration | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Miller, Andy | |
dc.contributor.imecauthor | La Tulipe, Douglas Charles | |
dc.contributor.orcidimec | Miller, Andy::0000-0001-7048-2242 | |
dc.identifier.doi | 10.1117/12.2608319 | |
dc.identifier.eisbn | 978-1-5106-4982-8 | |
dc.source.numberofpages | 17 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference | |
dc.source.conferencedate | FEB 24-MAY 27, 2022 | |
dc.source.volume | 12053 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |