Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

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dc.contributor.author	Edinger, Pierre
dc.contributor.author	Kristinsson, Kristofer
dc.contributor.author	Errando-Herranz, Carlos
dc.contributor.author	Takabayashi, Alain Yuji
dc.contributor.author	Sattari, Hamed
dc.contributor.author	Quack, Niels
dc.contributor.author	Verheyen, Peter
dc.contributor.author	Bogaerts, Wim
dc.contributor.author	Gylfason, Kristinn B.
dc.date.accessioned	2022-09-09T02:41:54Z
dc.date.available	2022-09-09T02:41:54Z
dc.date.issued	2021
dc.identifier.issn	2160-9020
dc.identifier.other	WOS:000831479802308
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40400
dc.source	WOS
dc.title	Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform
dc.type	Proceedings paper
dc.contributor.imecauthor	Verheyen, Peter
dc.contributor.imecauthor	Bogaerts, Wim
dc.contributor.orcidimec	Verheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimec	Bogaerts, Wim::0000-0003-1112-8950
dc.identifier.eisbn	978-1-943580-91-0
dc.source.numberofpages	2
dc.source.peerreview	yes
dc.source.conference	Conference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedate	MAY 09-14, 2021
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/40400.2	2022-09-21T08:08:53Z	validation by library/open access desk
1	20.500.12860/40400*	2022-09-09T02:41:54Z