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dc.contributor.authorLin, Chupao
dc.contributor.authorPenaranda, Juan Santo Domingo
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorSchaubroeck, David
dc.contributor.authorBaets, Roel
dc.contributor.authorLe Thomas, Nicolas
dc.date.accessioned2022-09-09T02:41:57Z
dc.date.available2022-09-09T02:41:57Z
dc.date.issued2021
dc.identifier.issn2160-9020
dc.identifier.otherWOS:000831479801316
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40405
dc.sourceWOS
dc.titlePhotonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengths
dc.typeProceedings paper
dc.contributor.imecauthorLin, Chupao
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorLe Thomas, Nicolas
dc.contributor.orcidimecSchaubroeck, David::0000-0001-9576-3091
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.identifier.eisbn978-1-943580-91-0
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceConference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedateMAY 09-14, 2021
imec.availabilityUnder review


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