dc.contributor.author | Gupta, Mohit | |
dc.contributor.author | Perumkunnil, Manu | |
dc.contributor.author | Yasin, Farrukh | |
dc.contributor.author | Mirabelli, Gioele | |
dc.contributor.author | Garello, K. | |
dc.contributor.author | Gupta, Anshul | |
dc.contributor.author | Furnemont, Arnaud | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.date.accessioned | 2023-02-20T10:03:54Z | |
dc.date.available | 2022-09-16T02:49:54Z | |
dc.date.available | 2023-02-20T10:03:54Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4979-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844431900001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40426.2 | |
dc.source | WOS | |
dc.title | Challenges with SOT-MRAM integration towards N5 node and beyond | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gupta, Mohit | |
dc.contributor.imecauthor | Perumkunnil, Manu | |
dc.contributor.imecauthor | Yasin, Farrukh | |
dc.contributor.imecauthor | Mirabelli, Gioele | |
dc.contributor.imecauthor | Gupta, Anshul | |
dc.contributor.imecauthor | Furnemont, Arnaud | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.orcidimec | Gupta, Mohit::0000-0002-1924-1264 | |
dc.contributor.orcidimec | Perumkunnil, Manu::0000-0002-0029-6548 | |
dc.contributor.orcidimec | Yasin, Farrukh::0000-0002-7295-0254 | |
dc.contributor.orcidimec | Mirabelli, Gioele::0000-0001-7060-4836 | |
dc.contributor.orcidimec | Furnemont, Arnaud::0000-0002-6378-1030 | |
dc.identifier.doi | 10.1117/12.2613482 | |
dc.identifier.eisbn | 978-1-5106-4980-4 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1205202 | |
dc.source.endpage | na | |
dc.source.conference | Conference on DTCO and Computational Patterning | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.conferencelocation | San Jose, CA, USA | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12052 | |
imec.availability | Published - imec | |