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A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node

dc.contributor.authorTsai, Yi-Pei
dc.contributor.authorChang, Yi-Han
dc.contributor.authorWang, Jane
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorRonse, Kurt
dc.contributor.authorKim, Ryan Ryoung han
dc.date.accessioned2023-06-02T08:52:42Z
dc.date.available2022-09-16T02:49:55Z
dc.date.available2023-06-02T08:52:42Z
dc.date.issued2022
dc.identifier.isbn978-1-5106-4979-8
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000844431900002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40427.3
dc.sourceWOS
dc.titleA yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node
dc.typeProceedings paper
dc.contributor.imecauthorTsai, Yi-Pei
dc.contributor.imecauthorChang, Yi-Han
dc.contributor.imecauthorWang, Jane
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.identifier.doi10.1117/12.2617415
dc.identifier.eisbn978-1-5106-4980-4
dc.source.numberofpages9
dc.source.peerreviewyes
dc.source.beginpage1205203
dc.source.conferenceConference on DTCO and Computational Patterning
dc.source.conferencedateAPR 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12052
imec.availabilityPublished - imec


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320.500.12860/40427.3*2023-06-02T08:47:08Zvalidation by library/open access desk
120.500.12860/404272022-09-16T02:49:55Z

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