dc.contributor.author | Sherazi, Yasser | |
dc.contributor.author | Chang, Yi-Han | |
dc.contributor.author | Drissi, Youssef | |
dc.contributor.author | Chehab, Bilal | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Kim, Ryan Ryoung Han | |
dc.contributor.author | Lee, Jae Uk | |
dc.date.accessioned | 2022-09-29T15:22:19Z | |
dc.date.available | 2022-09-16T02:49:55Z | |
dc.date.available | 2022-09-26T09:28:29Z | |
dc.date.available | 2022-09-29T15:22:19Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4979-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844431900009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40428.4 | |
dc.source | WOS | |
dc.title | Design, patterning, and process integration overview for 2nm node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Sherazi, Yasser | |
dc.contributor.imecauthor | Chang, Yi-Han | |
dc.contributor.imecauthor | Drissi, Youssef | |
dc.contributor.imecauthor | Chehab, Bilal | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Kim, Ryan Ryoung Han | |
dc.contributor.imecauthor | Lee, Jae Uk | |
dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.identifier.doi | 10.1117/12.2615311 | |
dc.identifier.eisbn | 978-1-5106-4980-4 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 120520F | |
dc.source.conference | Conference on DTCO and Computational Patterning | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.conferencelocation | Sanjose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12052 | |
imec.availability | Published - imec | |