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Calibration of Gaussian Random Field stochastic EUV models
dc.contributor.author | Latypov, Azat M. | |
dc.contributor.author | Wei, Chih-, I | |
dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Khaira, Gurdaman | |
dc.contributor.author | Fenger, Germain | |
dc.date.accessioned | 2022-09-19T02:51:17Z | |
dc.date.available | 2022-09-19T02:51:17Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4977-4 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000850450900004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40465 | |
dc.source | WOS | |
dc.title | Calibration of Gaussian Random Field stochastic EUV models | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.contributor.orcidimec | De Bisschop, Peter::0000-0002-8297-5076 | |
dc.identifier.doi | 10.1117/12.2614142 | |
dc.identifier.eisbn | 978-1-5106-4978-1 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.volume | 12051 | |
imec.availability | Under review |
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