dc.contributor.author | Founta, Valeria | |
dc.contributor.author | Soulie, Jean-Philippe | |
dc.contributor.author | Sankaran, Kiroubanand | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Opsomer, Karl | |
dc.contributor.author | Morin, Pierre | |
dc.contributor.author | Lagrain, Pieter | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Vanhaeren, Danielle | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Van de Vondel, Joris | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Adelmann, Christoph | |
dc.date.accessioned | 2022-10-11T08:49:28Z | |
dc.date.available | 2022-10-09T02:50:50Z | |
dc.date.available | 2022-10-11T08:49:28Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2589-1529 | |
dc.identifier.other | WOS:000858650300002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40545.2 | |
dc.source | WOS | |
dc.title | Properties of ultrathin molybdenum films for interconnect applications | |
dc.type | Journal article | |
dc.contributor.imecauthor | Founta, Valeria | |
dc.contributor.imecauthor | Soulie, Jean-Philippe | |
dc.contributor.imecauthor | Sankaran, Kiroubanand | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Opsomer, Karl | |
dc.contributor.imecauthor | Morin, Pierre | |
dc.contributor.imecauthor | Lagrain, Pieter | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Vanhaeren, Danielle | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
dc.contributor.orcidimec | Sankaran, Kiroubanand::0000-0001-6988-7269 | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Morin, Pierre::0000-0002-4637-496X | |
dc.contributor.orcidimec | Lagrain, Pieter::0000-0003-3734-7203 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Vanhaeren, Danielle::0000-0001-8624-9533 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.contributor.orcidimec | Swerts, Johan::0000-0001-7547-7194 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1016/j.mtla.2022.101511 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 101511 | |
dc.source.endpage | 101525 | |
dc.source.journal | MATERIALIA | |
dc.source.issue | 24 | |
dc.source.volume | 24 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This work was supported by imec's industrial affiliate program on nano-interconnects. V.F. acknowledges the support by a PhD scholarship from the Fonds Wetenschappelijk Onderzoek - Vlaanderen (FWO). | |