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Properties of ultrathin molybdenum films for interconnect applications
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Properties of ultrathin Mo films for interconnect applications (2022).pdf (4.360Mb)
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Authors
Founta, Valeria
;
Soulie, Jean-Philippe
;
Sankaran, Kiroubanand
;
Vanstreels, Kris
;
Opsomer, Karl
;
Morin, Pierre
;
Lagrain, Pieter
;
Franquet, Alexis
;
Vanhaeren, Danielle
;
Conard, Thierry
;
Meersschaut, Johan
;
Detavernier, Christophe
;
Van de Vondel, Joris
;
De Wolf, Ingrid
;
Pourtois, Geoffrey
;
Tokei, Zsolt
;
Swerts, Johan
;
Adelmann, Christoph
DOI
10.1016/j.mtla.2022.101511
ISSN
2589-1529
Issue
24
Journal
MATERIALIA
Volume
24
Title
Properties of ultrathin molybdenum films for interconnect applications
Publication type
Journal article
Embargo date
9999-12-31
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2
20.500.12860/40545.2
*
2022-10-10T09:36:14Z
validation by imec author
1
20.500.12860/40545
2022-10-09T02:50:50Z
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