Browsing by author "Soulie, Jean-Philippe"
Now showing items 1-20 of 24
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A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash
Ramesh, Siva; Banerjee, Kaustuv; Opsomer, Karl; Rachita, Iuliana; Bastos, Joao; Soulie, Jean-Philippe; Sebaai, Farid; Favia, Paola; Korytov, Maxim; Richard, Olivier; Breuil, Laurent; Arreghini, Antonio; Van den Bosch, Geert; Rosmeulen, Maarten (2022) -
Al3Sc thin films as alternative interconnect metallization
Soulie, Jean-Philippe; Adelmann, Christoph; Swerts, Johan; Tokei, Zsolt (2022-03-28) -
Al3Sc thin films for advanced interconnect applications
Soulie, Jean-Philippe; Sankaran, Kiroubanand; Founta, Valeria; Opsomer, Karl; Detavernier, Christophe; Van de Vondel, Joris; Pourtois, Geoffrey; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2024) -
Aluminide intermetallics for advanced interconnect metallization: thin film studies
Soulie, Jean-Philippe; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2021) -
Buried Power Rail Metal exploration towards the 1 nm Node
Gupta, Anshul; Radisic, Dunja; Maes, J.W.; Varela Pedreira, Olalla; Soulie, Jean-Philippe; Jourdan, Nicolas; Mertens, Hans; Bandyopadhyay, Sudip; Le, Quoc Toan; Pacco, Antoine; Heylen, Nancy; Vandersmissen, Kevin; Devriendt, Katia; Zhu, C.; Datta, S.; Sebaai, Farid; Wang, S.; Mousa, M.; Lee, J.; Geypen, Jef; De Wachter, Bart; Chehab, Bilal; Salahuddin, Shairfe Muhammad; Murdoch, Gayle; Biesemans, Serge; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Determination of optical constants of thin films in the EUV
Ciesielski, Richard; Saadeh, Qais; Philipsen, Vicky; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Naujok, Philipp; van de Kruijs, Robbert W. E.; Detavernier, Christophe; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2022) -
Electronic stopping cross section for He in Ru, derived from RBS spectra
Meersschaut, Johan; Meersschaut, Simon; Soulie, Jean-Philippe; Heller, Rene (2024) -
Epitaxial growth of magnetron sputtered NiAl on Ge mediated by native GeOx
Ben Chroud, Mohamed; Korytov, Maxim; Soulie, Jean-Philippe; Adelmann, Christoph; Swerts, Johan; Temst, Kristiaan; Carpenter, Robert (2024) -
Erase behavior of charge trap flash memory devices using high-k dielectric as blocking oxide liner
Ramesh, Siva; Ajaykumar, Arjun; Bastos, Joao; Breuil, Laurent; Arreghini, Antonio; Nyns, Laura; Soulie, Jean-Philippe; Ragnarsson, Lars-Ake; Schleicher, Filip; Jossart, Nico; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2020) -
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
Ajaykumar, Arjun; Breuil, Laurent; Katcko, Kostantine; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Ramesh, Siva; Arreghini, Antonio; Nyns, Laura; Soulie, Jean-Philippe; Stiers, Jimmy; Rosmeulen, Maarten; Van den Bosch, Geert (2021) -
Improved resistivity of NiAl thin films at low temperature for advanced interconnect metallization
Soulie, Jean-Philippe; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2022-06) -
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
Tokei, Zsolt; Vega Gonzalez, Victor; Murdoch, Gayle; O'Toole, Martin; Croes, Kristof; Baert, Rogier; van der Veen, Marleen; Adelmann, Christoph; Soulie, Jean-Philippe; Boemmels, Juergen; Wilson, Chris; Park, Seongho; Sankaran, Kiroubanand; Pourtois, Geoffrey; Swerts, Johan; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Lazzarino, Frederic; Versluijs, Janko; Blanco, Victor; Ercken, Monique; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank; Heylen, Nancy; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Morin, Pierre; Jourdan, Nicolas; Van Elshocht, Sven; Ciofi, Ivan; Gupta, Anshul; Zahedmanesh, Houman; Vanstreels, Kris; Na, Myung Hee (2020) -
Intermetallic Compounds as Alternatives to Copper for Advanced Interconnect Metallization
Adelmann, Christoph; Soulie, Jean-Philippe; Scheerder, Jeroen; Fleischmann, Claudia; Sankaran, Kiroubanand; Pourtois, Geoffrey; Swerts, Johan; Tokei, Zsolt (2023) -
Mask absorber for next generation EUV lithography
Wu, Meiyi; Thakare, Devesh; De Marneffe, Jean-Francois; Jaenen, Patrick; Souriau, Laurent; Opsomer, Karl; Soulie, Jean-Philippe; Erdmann, Andreas; Mesilhy, Hazem; Naujok, Philipp; Foltin, Markus; Soltwisch, Victor; Saadeh, Qais; Philipsen, Vicky (2020) -
Optical constants for EUV scatterometry
Ciesielski, Richard; Saadeh, Qais; Naujok, Philipp; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Philipsen, Vicky; Van de Kruijs, Robbert; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2021) -
Properties of ultrathin molybdenum films for interconnect applications
Founta, Valeria; Soulie, Jean-Philippe; Sankaran, Kiroubanand; Vanstreels, Kris; Opsomer, Karl; Morin, Pierre; Lagrain, Pieter; Franquet, Alexis; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Detavernier, Christophe; Van de Vondel, Joris; De Wolf, Ingrid; Pourtois, Geoffrey; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2022) -
Reduced resistivity of NiAl by backthinning for advanced interconnect metallization
Soulie, Jean-Philippe; Tokei, Zsolt; Heylen, Nancy; Adelmann, Christoph (2023) -
Ru Stress Assessment by Membrane Wrinkling for Interconnect Applications
Founta, Valeria; Soulie, Jean-Philippe; De Wolf, Ingrid; de Vondel, Joris Van; Swerts, Johan; Tokei, Zsolt; Adelmann, Christoph (2023) -
Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails
Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022) -
Study of novel EUVL mask absorber candidates
Wu, Meiyi; Thakare, Devesh; De Marneffe, Jean-Francois; Jaenen, Patrick; Souriau, Laurent; Opsomer, Karl; Soulie, Jean-Philippe; Erdmann, Andreas; Mesilhy, Hazem; Naujok, Philipp; Foltin, Markus; Soltwisch, Victor; Saadeh, Qais; Philipsen, Vicky (2021)