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Improved resistivity of NiAl thin films at low temperature for advanced interconnect metallization
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Authors
Soulie, Jean-Philippe
;
Tokei, Zsolt
;
Swerts, Johan
;
Adelmann, Christoph
DOI
10.1109/IITC52079.2022.9881310
ISSN
2380-6338
Conference
2022 IEEE International Interconnect Technology Conference (IITC)
Journal
N/A
Title
Improved resistivity of NiAl thin films at low temperature for advanced interconnect metallization
Publication type
Proceedings paper
Embargo date
9999-12-31
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2
20.500.12860/41426.2
*
2024-04-09T06:55:49Z
validation by library/open access desk
1
20.500.12860/41426
2023-04-04T15:28:33Z
*Selected version
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