Authors

Ajaykumar, Arjun; Breuil, Laurent; Katcko, Kostantine; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Ramesh, Siva; Arreghini, Antonio; Nyns, Laura; Soulie, Jean-Philippe; Stiers, Jimmy; Rosmeulen, Maarten; Van den Bosch, Geert

Conference

2021 Symposium on VLSI Technology

Title

First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices

Publication type

Proceedings paper