Publication:
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
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2023 since deposited on 2021-10-31
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Acq. date: 2026-07-20
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Statistics
Views
2023 since deposited on 2021-10-31
2last month
1last week
Acq. date: 2026-07-20
Citations