Publication:
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
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2007 since deposited on 2021-10-31
11last month
Acq. date: 2026-01-11
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Metrics
Views
2007 since deposited on 2021-10-31
11last month
Acq. date: 2026-01-11
Citations