Publication:
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
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1996 since deposited on 2021-10-31
3last month
1last week
Acq. date: 2025-12-10
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Views
1996 since deposited on 2021-10-31
3last month
1last week
Acq. date: 2025-12-10
Citations