Publication:

First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices

Date

2021

Proceedings Paper

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Author(s)

Ajaykumar, Arjun

;

Breuil, Laurent

;

Katcko, Kostantine

;

Schleicher, Filip

;

;

;

;

Arreghini, Antonio

;

;

Soulie, Jean-Philippe

;

;

Rosmeulen, Maarten

;

Van den Bosch, Geert

Statistics

2009 since deposited on 2021-10-31

2last month

Acq. date: 2026-02-27