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Determination of optical constants of thin films in the EUV
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Authors
Ciesielski, Richard
;
Saadeh, Qais
;
Philipsen, Vicky
;
Opsomer, Karl
;
Soulie, Jean-Philippe
;
Wu, Meiyi
;
Naujok, Philipp
;
van de Kruijs, Robbert W. E.
;
Detavernier, Christophe
;
Kolbe, Michael
;
Scholze, Frank
;
Soltwisch, Victor
DOI
10.1364/AO.447152
ISSN
1559-128X
PMID
MEDLINE:35297898
Issue
8
Journal
APPLIED OPTICS
Volume
61
Title
Determination of optical constants of thin films in the EUV
Publication type
Journal article
Embargo date
2022-03-31
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3
20.500.12860/39535.3
*
2022-04-05T08:56:36Z
validation by library/open access desk
2
20.500.12860/39535.2
2022-03-28T11:53:18Z
validation by imec author
1
20.500.12860/39535
2022-03-26T02:08:25Z
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