Browsing by author "Kolbe, Michael"
Now showing items 1-8 of 8
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ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Hang Chun; Adelmann, Christoph; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, K.; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard; Schmeisser, Dieter; Tallarida, Massimo (2010) -
Determination of optical constants of thin films in the EUV
Ciesielski, Richard; Saadeh, Qais; Philipsen, Vicky; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Naujok, Philipp; van de Kruijs, Robbert W. E.; Detavernier, Christophe; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2022) -
Optical constants for EUV scatterometry
Ciesielski, Richard; Saadeh, Qais; Naujok, Philipp; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Philipsen, Vicky; Van de Kruijs, Robbert; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2021) -
Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Abbasirad, Najmeh; Saadeh, Qais; Ciesielski, Richard; Gottwald, Alexander; Philipsen, Vicky; Makhotkin, Igor; Sokolov, Andrey; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2023) -
Precise optical constants: determination and impact on metrology, simulation and development of EUV masks
Saadeh, Qais; Mesilhy, Hazem; Soltwisch, Victor; Erdmann, Andreas; Ciesielski, Richard; Lohr, Leonhard; Andrle, Anna; Philipsen, Vicky; Thakare, Devesh; Laubis, Christian; Scholze, Frank; Kolbe, Michael (2022) -
S-passivation of the Ge gate stack using (NH4)2S
Sioncke, Sonja; Fleischmann, Claudia; Lin, Dennis; Vrancken, Evi; Caymax, Matty; Meuris, Marc; Temst, Kristiaan; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard (2010) -
Study of EUV reticle storage effects through exposure on EBL2 and NXE
Jonckheere, Rik; Aubert, Remko; Nair, Vineet Vijayakrishnan; Hendrickx, Eric; Wu, Chien-ching; de Rooij-Lohmann, Veronique; Eslstgeest, Dorus; lenseL, Henk; Soltwich, Victor; Hoenicke, Philipp; Kolbe, Michael; Scholze, Frank (2020) -
Towards passivation of Ge(100) surfaces by sulfur adsorption from (NH4)2S solution: a combined NEXAFS, STM and LEED study
Fleischmann, Claudia; Sioncke, Sonja; Couet, S.; Schouteden, K.; Beckhoff, Burkhard; Muller, Matthias; Honicke, P.; Kolbe, Michael; Van Haesendonck, C.; Meuris, Marc; Temst, Kristiaan; Vantomme, Andre (2011)