Authors
Abbasirad, Najmeh;
Saadeh, Qais;
Ciesielski, Richard;
Gottwald, Alexander;
Philipsen, Vicky;
Makhotkin, Igor;
Sokolov, Andrey;
Kolbe, Michael;
Scholze, Frank;
Soltwisch, Victor
EISBN
978-1-5106-6100-4
ISBN
978-1-5106-6099-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVII
Journal
Proceedings of SPIE
Volume
12496
Title
Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Publication type
Proceedings paper
Embargo date
2023-03-31