Browsing by author "Ciesielski, Richard"
Now showing items 1-7 of 7
-
Determination of optical constants of thin films in the EUV
Ciesielski, Richard; Saadeh, Qais; Philipsen, Vicky; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Naujok, Philipp; van de Kruijs, Robbert W. E.; Detavernier, Christophe; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2022) -
Optical constants for EUV scatterometry
Ciesielski, Richard; Saadeh, Qais; Naujok, Philipp; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Philipsen, Vicky; Van de Kruijs, Robbert; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2021) -
Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Abbasirad, Najmeh; Saadeh, Qais; Ciesielski, Richard; Gottwald, Alexander; Philipsen, Vicky; Makhotkin, Igor; Sokolov, Andrey; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2023) -
Precise optical constants: determination and impact on metrology, simulation and development of EUV masks
Saadeh, Qais; Mesilhy, Hazem; Soltwisch, Victor; Erdmann, Andreas; Ciesielski, Richard; Lohr, Leonhard; Andrle, Anna; Philipsen, Vicky; Thakare, Devesh; Laubis, Christian; Scholze, Frank; Kolbe, Michael (2022) -
Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
Ciesielski, Richard; Lohr, Leonhard M.; Mertens, Hans; Charley, Anne-Laure; de Ruyter, Rudi; Bogdanowicz, Janusz; Hoenicke, Philipp; Abbasirad, Najmeh; Soltwisch, Victor (2023) -
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques
Hoenicke, Philipp; Kayser, Yves; Soltwisch, Victor; Waehlish, Andre; Wauschkuhn, Nils; Scheerder, Jeroen; Fleischmann, Claudia; Bogdanowicz, Janusz; Charley, Anne-Laure; Veloso, Anabela; Loo, Roger; Mertens, Hans; Hikavyy, Andriy; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Ciesielski, Richard; Beckhoff, Burkhard (2023) -
Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
Ciesielski, Richard; Loo, Roger; Shimura, Yosuke; Bogdanowicz, Janusz; Mani, Antonio; Mitterbauer, Christoph; Truong, Vinh-Binh; Kolbe, Michael; Soltwisch, Victor (2024)