EISBN
978-1-5106-7217-8
ISBN
978-1-5106-7216-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVIII
Journal
Proceedings of SPIE
Volume
12955
Title
Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
Publication type
Proceedings paper
Embargo date
2024-04-09