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Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

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Acq. date: 2026-03-01

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306 since deposited on 2024-06-15
23last month
7last week
Acq. date: 2026-03-01

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648 since deposited on 2024-06-15
Acq. date: 2026-03-01

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