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Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
Publication:
Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3009953
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ciesielski, Richard
;
Loo, Roger
;
Shimura, Yosuke
;
Bogdanowicz, Janusz
;
Mani, Antonio
;
Mitterbauer, Christoph
;
Truong, Vinh-Binh
;
Kolbe, Michael
;
Soltwisch, Victor
Journal
Proceedings of SPIE
Abstract
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220
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648
since deposited on 2024-06-15
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Acq. date: 2025-12-11
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Downloads
220
since deposited on 2024-06-15
42
last month
7
last week
Acq. date: 2025-12-11
Views
648
since deposited on 2024-06-15
3
last month
Acq. date: 2025-12-11
Citations