Publication:

Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3009953
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Published version 1.4 MB

Author(s)

Ciesielski, Richard
;
Loo, Roger  
;
Shimura, Yosuke  
;
Bogdanowicz, Janusz  
;
Mani, Antonio
;
Mitterbauer, Christoph
;
Truong, Vinh-Binh
;
Kolbe, Michael
;
Soltwisch, Victor

Journal

Proceedings of SPIE

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378 since deposited on 2024-06-15
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652 since deposited on 2024-06-15
Acq. date: 2026-07-18

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