Browsing by author "Mitterbauer, Christoph"

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Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX

Meura, Kim-Anh Bui-Thi; Torregrosa, Frank; Robbes, Anne-Sophie; Choi, Seoyoun; Merkulov, Alexandre; Moret, Mona; Duchaine, Julian; Horiguchi, Naoto; Li, Letian; Mitterbauer, Christoph (2014)
Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

Ciesielski, Richard; Loo, Roger; Shimura, Yosuke; Bogdanowicz, Janusz; Mani, Antonio; Mitterbauer, Christoph; Truong, Vinh-Binh; Kolbe, Michael; Soltwisch, Victor (2024)