Publication:
Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX
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1845 since deposited on 2021-10-22
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Acq. date: 2026-01-11
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1845 since deposited on 2021-10-22
2last month
2last week
Acq. date: 2026-01-11
Citations