Publication:

Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX

Date

2014

Proceedings Paper

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Files

31357.pdf 655.31 KB

Author(s)

Meura, Kim-Anh Bui-Thi

;

Torregrosa, Frank

;

Robbes, Anne-Sophie

;

;

Merkulov, Alexandre

;

;

Duchaine, Julian

;

Horiguchi, Naoto

;

;

Mitterbauer, Christoph

Statistics

1845 since deposited on 2021-10-22

2last month

Acq. date: 2026-01-26