Browsing by author "Bogdanowicz, Janusz"
Now showing items 1-20 of 115
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300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Moussa, Alain; Bogdanowicz, Janusz; Groven, Benjamin; Morin, Pierre; Beggiato, Matteo; Saib, Mohamed; Santoro, G.; Abramovitz, Y.; Houchens, K.; Ben Nissim, S.; Meir, N.; Hung, J.; Urbanowicz, A.; Koret, R.; Turovets, I.; Lorusso, Gian; Charley, Anne-Laure (2023) -
3D dopant profiling in silicon nanowires
Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Bogdanowicz, Janusz; Kumar, Arul; Veloso, Anabela; Vandervorst, Wilfried (2016) -
3D imaging of atom probe tip shapes with atomic force microscopy
Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Op de Beeck, Jonathan; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography
Cools, Sigfried; Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; De Beenhouwer, Jan; Sijbers, Jan; Vandervorst, Wilfried (2022) -
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A layer-by-layer reconstruction method including field of view effects, missing atoms and laser effects
Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; Vandervorst, Wilfried (2018) -
Accuracy in APT analysis: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried (2017) -
Advanced characterization of 2D materials using SEM image processing and machine learning
Saib, Mohamed; Moussa, Alain; Beggiato, Matteo; Groven, Benjamin; Medina Silva, Henry; Morin, Pierre; Bogdanowicz, Janusz; Kar, Gouri Sankar; Charley, Anne-Laure (2024) -
Advanced Raman spectroscopy using nanofocusing of light
Nuytten, Thomas; Bogdanowicz, Janusz; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2017) -
Advanced use of therma-probe for ultra-shallow junction monitoring
Bogdanowicz, Janusz; Clarysse, Trudo; Smets, Gerrit; Rosseel, Erik; Vandervorst, Wilfried (2011) -
Advances in optical carrier profiling through high-frequency modulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena; Opsal, Jon (2007) -
Advances in optical carrier profiling through high-frequency modulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena; Opsal, Jon (2008) -
Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy
Nuytten, Thomas; Jamal, Muhammad Tahir; Hantschel, Thomas; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2016) -
Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy
Nuytten, Thomas; Bogdanowicz, Janusz; Witters, Liesbeth; Eneman, Geert; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2018) -
Apparent size effects on dopant activation in nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Favia, Paola; Wouters, Lennaert; Petersen, Dirch Hjorth; Hansen, Ole; Henrichsen, Henrik Hartmann; Nielsen, Peter Former; Shiv, Lior; Vandervorst, Wilfried (2021) -
APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
Melkonyan, Davit; Fleischmann, Claudia; Veloso, Anabela; Arnoldi, Laurent; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2016) -
Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Melkonyan, Davit; Fleischmann, Claudia; Arnoldi, Laurent; Demeulemeester, Jelle; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2017) -
Atom probe tomography for advanced nanoelectronic devices: current status and perspectives
Barnes, J.P.; Grenier, A.; Mouton, I.; Barraud, S; Audoit, G.; Bogdanowicz, Janusz; Fleischmann, Claudia; Melkonyan, Davit; Vandervorst, Wilfried; Duguay, S.; Roland, N.; Vurpillot, F; Blavette, D (2018) -
Atom probe tomography for advanced semiconductor technology research
Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Morris, Richard; Bogdanowicz, Janusz; Vandervorst, Wilfried (2017) -
Challenges for APT in advanced semiconductor technology research
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Arnoldi, Laurent; Kumar, Arul; Vurpillot, Francois; Vandervorst, Wilfried (2016)