Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts

Metadata

Show full item record

Authors

Melkonyan, Davit; Fleischmann, Claudia; Arnoldi, Laurent; Demeulemeester, Jelle; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried

ISSN

0304-3991

Journal

Ultramicroscopy

Volume

179

Title

Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts

Publication type

Journal article

Collections

Articles