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Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Publication:
Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Date
2017
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Melkonyan, Davit
;
Fleischmann, Claudia
;
Arnoldi, Laurent
;
Demeulemeester, Jelle
;
Kumar, Arul
;
Bogdanowicz, Janusz
;
Vurpillot, Francois
;
Vandervorst, Wilfried
Journal
Ultramicroscopy
Abstract
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2007
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
2007
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations