Authors

Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried

Conference

Atom Probe Tomography and Microscopy - APT&M

Title

A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon

Publication type

Proceedings paper