Publication:
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Date
| dc.contributor.author | Melkonyan, Davit | |
| dc.contributor.author | Fleischmann, Claudia | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Morris, Richard | |
| dc.contributor.author | Cuduvally, Ramya | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Fleischmann, Claudia | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Morris, Richard | |
| dc.contributor.imecauthor | Cuduvally, Ramya | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.contributor.orcidimec | Morris, Richard::0000-0002-0902-7088 | |
| dc.date.accessioned | 2021-10-25T23:20:34Z | |
| dc.date.available | 2021-10-25T23:20:34Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31329 | |
| dc.source.conference | Atom Probe Tomography and Microscopy - APT&M | |
| dc.source.conferencedate | 10/06/2018 | |
| dc.source.conferencelocation | Gaithersburg, MD USA | |
| dc.title | A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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