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A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
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A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Melkonyan, Davit
;
Fleischmann, Claudia
;
Bogdanowicz, Janusz
;
Morris, Richard
;
Cuduvally, Ramya
;
Vandervorst, Wilfried
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1868
since deposited on 2021-10-25
Acq. date: 2025-12-10
Citations
Metrics
Views
1868
since deposited on 2021-10-25
Acq. date: 2025-12-10
Citations