Advanced use of therma-probe for ultra-shallow junction monitoring

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Authors
Bogdanowicz, Janusz; Clarysse, Trudo; Smets, Gerrit; Rosseel, Erik; Vandervorst, Wilfried
Conference
Frontiers of Characterization and Metrology for Nanoelectronics
Title
Advanced use of therma-probe for ultra-shallow junction monitoring
Publication type
Proceedings paper
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