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Advanced use of therma-probe for ultra-shallow junction monitoring
Publication:
Advanced use of therma-probe for ultra-shallow junction monitoring
Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Clarysse, Trudo
;
Smets, Gerrit
;
Rosseel, Erik
;
Vandervorst, Wilfried
Journal
Abstract
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1940
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1940
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations