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Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy
Publication:
Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy
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Date
2016
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nuytten, Thomas
;
Jamal, Muhammad Tahir
;
Hantschel, Thomas
;
Bogdanowicz, Janusz
;
Schulze, Andreas
;
Favia, Paola
;
Bender, Hugo
;
De Wolf, Ingrid
;
Vandervorst, Wilfried
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1949
since deposited on 2021-10-23
Acq. date: 2026-01-07
Citations
Metrics
Views
1949
since deposited on 2021-10-23
Acq. date: 2026-01-07
Citations