Publication:

Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy

Date

2016
Presentation
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dc.contributor.authorNuytten, Thomas
dc.contributor.authorJamal, Muhammad Tahir
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-23T13:18:29Z
dc.date.available2021-10-23T13:18:29Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27084
dc.source.conferencePTW 2016H2
dc.source.conferencedate17/10/2016
dc.source.conferencelocationLeuven Belgium
dc.title

Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy

dc.typeOral presentation
dspace.entity.typePublication
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