Browsing by author "Bogdanowicz, Janusz"
Now showing items 21-40 of 112
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Correcting the boron concentration for the detection losses through multi hit events.
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
Critical dimension metrology using Raman spectroscopy
Gawlik, Andrzej; Bogdanowicz, Janusz; Nuytten, Thomas; Charley, Anne-Laure; Teugels, Lieve; Misiewicz, Jan; Vandervorst, Wilfried (2020) -
Detection of bonding voids for 3D integration
Chen, Cong; Van den Heuvel, Dieter; Beggiato, Matteo; Tunca Altintas, Bensu; Moussa, Alain; Vandooren, Anne; Baudemprez, Bart; Schobitz, Michael; Khaldi, Wassim; Bogdanowicz, Janusz; Beral, Christophe; Charley, Anne-Laure (2023) -
Dopant, composition and carrier profiling for 3D-structures
Vandervorst, Wilfried; Fleischmann, Claudia; Bogdanowicz, Janusz; Celano, Umberto; Paredis, Kristof; Budrevich, A (2017) -
Electrical characterization of single nanometer-wide Si fins in dense arrays
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Dirch, Petersen; Ole, Hansen; Henrik, Henrichsen; Nielsen, Peter; Shiv, Lior; Vandervorst, Wilfried (2018) -
Electrical resistance measurements of individual nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Petersen, D.H.; Hansen, O.; Henrichsen, H.; Nielsen, P.F.; Vandervorst, Wilfried (2017) -
Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Salnik, Alex (2010) -
Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
Melkonyan, Davit; Arnoldi, Laurent; Fleischmann, Claudia; Kumar, Arul; Vurpillot, Francois; Bogdanowicz, Janusz; Vandervorst, Wilfried (2016) -
Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology
Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021) -
Enhanced light coupling into periodic arrays of nm-scale semiconducting fins
Gawlik, Andrzej; Bogdanowicz, Janusz; Schulze, Andreas; Nuytten, Thomas; Tarnowski, Karol; Misiewicz, Jan; Vandervorst, Wilfried (2018) -
Experimental determination of the apex temperature of a semiconducting tip during laser-assisted atom probe tomography
Kumar, Arul; Demeulemeester, Jelle; Bogdanowicz, Janusz; Bran, Julien; Melkonyan, Davit (2014) -
Fundamental study of laser interactions with periodic arrays of nanoscale Si fin structures
Gawlik, Andrzej; Bogdanowicz, Janusz; Schulze, Andreas; Misiewicz, Jan; Vandervorst, Wilfried (2017) -
Fundamental study of photomodulated optical reflectance towards non-destructive carrier profiling in silicon
Bogdanowicz, Janusz (2011-05) -
Ge:B and GeSn:B low temperature selective epitaxial growth schemes for source/drain layers in Ge pMOS devices
Vohra, Anurag; Porret, Clément; Kohen, David; Folkersma, Steven; Bogdanowicz, Janusz; Schaekers, Marc; Tolle, John; Hikavyy, Andriy; Capogreco, Elena; Witters, Liesbeth; Langer, Robert; Vandervorst, Wilfried; Loo, Roger (2018) -
Ge:B and GeSn:B low temperature selective epitaxial growth schemes for source/drain layers in Ge pMOS devices
Vohra, Anurag; Porret, Clément; Kohen, David; Folkersma, Steven; Bogdanowicz, Janusz; Schaekers, Marc; Tolle, John; Hikavyy, Andriy; Capogreco, Elena; Witters, Liesbeth; Langer, Robert; Vandervorst, Wilfried; Loo, Roger (2019) -
Imaging of buried overlay and alignment markers using picosecond acoustic microscopy
Mehendale, Manjusha; Antonelli, Andy; Mair, Robin; Mukundhan, Priya; Bogdanowicz, Janusz; Blanco, Victor; Charley, Anne-Laure; Leray, Philippe (2022) -
IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced Metrology
Mehendale, M.; Antonelli, A.; Mair, R.; Mukundhan, P.; Bogdanowicz, Janusz; Charley, Anne-Laure; Leray, Philippe; Yasin, Farrukh; Crotti, Davide (2021) -
Impact of band gap narrowing and surface recombination on photoelectrothermal modulated optical reflectance power curves
Dortu, Fabian; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried (2008) -
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2008) -
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2008)