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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Authors
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
Journal
Materials Science & Engineering B
Volume
154-155
Title
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Publication type
Journal article
Embargo date
9999-12-31
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