Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Dortu, Fabian
dc.contributor.author	Clarysse, Trudo
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Shaughnessy, Derrick
dc.contributor.author	Salnick, Alex
dc.contributor.author	Nicolaides, Lena
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned	2021-10-17T06:19:52Z
dc.date.available	2021-10-17T06:19:52Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13411
dc.source.beginpage	234
dc.source.endpage	239
dc.source.journal	Materials Science & Engineering B
dc.source.volume	154-155
dc.title	Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
dc.type	Journal article
dspace.entity.type	Publication
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