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Articles
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Publication:
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Date
2008
Journal article
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17249.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
Journal
Materials Science & Engineering B
Abstract
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1955
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations
Metrics
Views
1955
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations