Authors

Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena

Conference

E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices

Title

Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Publication type

Meeting abstract