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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Authors
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
Conference
E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices
Title
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Meeting abstract
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