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Conference contributions
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
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1876
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations
Metrics
Views
1876
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations