Authors

Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Petersen, D.H.; Hansen, O.; Henrichsen, H.; Nielsen, P.F.; Vandervorst, Wilfried

Conference

EMRS Fall Meeting Symposium M: Material and device integration on silicon for advanced applications

Title

Electrical resistance measurements of individual nanometer-wide Si fins

Publication type

Meeting abstract