Publication:
Electrical resistance measurements of individual nanometer-wide Si fins
Date
| dc.contributor.author | Folkersma, Steven | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Schulze, Andreas | |
| dc.contributor.author | Petersen, D.H. | |
| dc.contributor.author | Hansen, O. | |
| dc.contributor.author | Henrichsen, H. | |
| dc.contributor.author | Nielsen, P.F. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Folkersma, Steven | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.accessioned | 2021-10-24T04:48:08Z | |
| dc.date.available | 2021-10-24T04:48:08Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28348 | |
| dc.identifier.url | https://www.european-mrs.com/material-and-device-integration-silicon-advanced-applications-emrs | |
| dc.source.beginpage | M.LM.11 | |
| dc.source.conference | EMRS Fall Meeting Symposium M: Material and device integration on silicon for advanced applications | |
| dc.source.conferencedate | 18/09/2017 | |
| dc.source.conferencelocation | Warsaw Poland | |
| dc.title | Electrical resistance measurements of individual nanometer-wide Si fins | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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