Electrical characterization of single nanometer-wide Si fins in dense arrays

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Authors

Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Dirch, Petersen; Ole, Hansen; Henrik, Henrichsen; Nielsen, Peter; Shiv, Lior; Vandervorst, Wilfried

ISSN

2190-4286

Journal

Beilstein Journal of Nanotechnology

Volume

9

Title

Electrical characterization of single nanometer-wide Si fins in dense arrays

Publication type

Journal article

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