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Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
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Authors
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Salnik, Alex
ISSN
0021-8979
Issue
10
Journal
Journal of Applied Physics
Volume
108
Title
Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Publication type
Journal article
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