Publication:
Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Date
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Dortu, Fabian | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Salnik, Alex | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.accessioned | 2021-10-18T15:23:25Z | |
| dc.date.available | 2021-10-18T15:23:25Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0021-8979 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16772 | |
| dc.source.beginpage | 104908 | |
| dc.source.issue | 10 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 108 | |
| dc.title | Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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