Authors

Mehendale, M.; Antonelli, A.; Mair, R.; Mukundhan, P.; Bogdanowicz, Janusz; Charley, Anne-Laure; Leray, Philippe; Yasin, Farrukh; Crotti, Davide

DOI

10.1109/ASMC51741.2021.9435649

EISBN

978-1-7281-8645-0

ISSN

1078-8743

Conference

32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal

na

Title

IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced Metrology

Publication type

Proceedings paper