Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

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Authors

Barnes, J.P.; Grenier, A.; Mouton, I.; Barraud, S; Audoit, G.; Bogdanowicz, Janusz; Fleischmann, Claudia; Melkonyan, Davit; Vandervorst, Wilfried; Duguay, S.; Roland, N.; Vurpillot, F; Blavette, D

ISSN

1359-6462

Journal

Scripta Materialia

Volume

148

Title

Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

Publication type

Journal article

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