Publication:

Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

Date

2018
Journal article
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Author(s)

Barnes, J.P.
;
Grenier, A.
;
Mouton, I.
;
Barraud, S
;
Audoit, G.
;
Bogdanowicz, Janusz  
;
Fleischmann, Claudia  
;
Melkonyan, Davit
;
Vandervorst, Wilfried  
;
Duguay, S.
;
Roland, N.
;
Vurpillot, F
;
Blavette, D

Journal

Scripta Materialia

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2100 since deposited on 2021-10-25
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Acq. date: 2026-01-11

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