Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

dc.contributor.author	Barnes, J.P.
dc.contributor.author	Grenier, A.
dc.contributor.author	Mouton, I.
dc.contributor.author	Barraud, S
dc.contributor.author	Audoit, G.
dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Fleischmann, Claudia
dc.contributor.author	Melkonyan, Davit
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Duguay, S.
dc.contributor.author	Roland, N.
dc.contributor.author	Vurpillot, F
dc.contributor.author	Blavette, D
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Fleischmann, Claudia
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimec	Fleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned	2021-10-25T16:39:52Z
dc.date.available	2021-10-25T16:39:52Z
dc.date.issued	2018
dc.identifier.issn	1359-6462
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/30208
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S1359646217302440
dc.source.beginpage	91
dc.source.endpage	97
dc.source.journal	Scripta Materialia
dc.source.volume	148
dc.title	Atom probe tomography for advanced nanoelectronic devices: current status and perspectives
dc.type	Journal article
dspace.entity.type	Publication
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