Publication:

ALD on high mobility channels: engineering the proper gate stack passivation

Date

2010
Proceedings Paper
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Author(s)

Sioncke, Sonja
;
Lin, Hang Chun
;
Adelmann, Christoph  
;
Brammertz, Guy  
;
Delabie, Annelies  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Caymax, Matty  
;
Meuris, Marc  
;
Struyf, Herbert  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Fleischmann, Claudia  
;
Temst, K.
;
Vantomme, Andre  
;
Muller, Matthias
;
Kolbe, Michael
;
Beckhoff, Burkhard
;
Schmeisser, Dieter
;
Tallarida, Massimo

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1961 since deposited on 2021-10-18
2last month
Acq. date: 2026-04-06

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